Product Description
HPM10V is a piezoresistive vacuum gauge. It uses a silicon piezoresistive sensor as the sensitive element and directly measures pressure using a vacuum connection. Its analog output signals such as 0-5 or 0-10 VDC are proportional to the measured pressure and are not affected by the type and composition of the process gas. The diffused silicon chip inside the sensor is encapsulated by a stainless steel 316L diaphragm and cavity. A specially developed dedicated circuit board ensures stable and reliable performance and a compact appearance.
Applications
- Vacuum application
- Laboratory and research and development
- Semiconductor industry
- Vacuum packaging
- Plasma etching process equipment
Product Features
- Silicon piezoresistive principle
- High precision and good stability
- Detection is not affected by gas type and composition
- Fast response and low hysteresis
- Direct pressure measurement, analog output signal is proportional to the measured pressure
- Support various pressure interfaces KF, CF, VCR, etc. in the vacuum industry
Product Parameters
| Measuring Range |
Absolute
(kPa) |
Rated pressure |
10 |
20 |
50 |
100 |
150 |
200 |
|
| Overload |
100 |
100 |
150 |
200 |
400 |
400 |
|
| Note: For other measuring ranges, please contact us. |
| Measuring Medium |
| Type |
Various gases compatible with contact materials |
| Output Signal/Power Supply |
| Standard |
4~20mA / Vs=10~30 VDC |
| Standard |
0~5VDC /Vs=8.5~30 VDC |
| Standard |
0~10VDC /Vs=12~30 VDC |
| Standard |
RS485 /Vs=10~30 VDC |
| Performance |
|
| Accuracy |
±0.25%FS (typical)
±0.1%FS (optional) |
|
| Long-term stability |
±0.30%FS/year, ≤35kPa
±0.20%FS/year, >35kPa |
|
| *Accuracy complies with IEC 60770 (non-linearity, hysteresis, repeatability) |
|
| Environment Conditions |
|
| Temperature range |
Working temperature: -40~100ºC
Ambient temperature: -30~85ºC
Storage temperature: -30~85ºC |
|
| Protection grade |
IP65 |
|
Dimension (Unit:mm)
Pressure interface for choice
| DIN43650 |
M12x1 4P |
 |
|
| Cable outlet |
M12x1 4P with cables |
|
|
Ordering Guide
| Item |
Type |
|
| HPM10V |
Piezoresistive Vacuum Gauge |
| |
Range |
Pressure Range |
|
| (0~X)kPa |
Fill X directly.
Also support Torr or mbar |
| |
Item |
Output |
|
| B1 |
4~20mA |
| B3 |
0-10V |
| B4 |
0-5V |
| B7 |
RS485 |
| |
Item |
Process Port |
|
| VKF16 |
DN 16 ISO-KF |
| VCF16 |
DN 16 CF |
| VT4 |
0.5'' outer tube |
| VT2 |
0.25'' outer tube |
| VR8M |
1/2 VCR Female, swivel joint. |
| VR4M |
1/4 VCR Female, swivel joint. |
| VR4F |
1/2 VCR male, swivel joint. |
| VP1 |
M20*1.5 Male |
| |
Item |
Electronic output |
|
| C1 |
DIN43650 |
| C2 |
Cable outlet |
| C5 |
M12*1 |
| CD15 |
15 Pins, D-sub connector |
| |
Item |
Sensor |
|
| M1 |
SS316L Silicon Piezoresistor |
| |
Item |
Housing material |
|
| S4 |
304 |
| S6 |
316L |
| |
Item |
Additional Function |
| A |
Absolute(typical) |
| QF |
Delivery inspection report |
| |
Other customized requirements |
| HPM10V |
(0~80)kPa |
B1 |
VKF16 |
C2 |
M1 |
S6 |
A |
Company Profile
1. Q: Are you a manufacturer or trading company?
A: We are a manufacturer which focuses on sensors for 10 years.
2. Q: What's your quality control system?
A: MC, ISO9001, CE Certificated.
3. Q: What is the warranty of your products?
A: Our warranty time is 18 months after shipment.
4. Q: What is the lead time of your product?
A: Normally, our factory lead time is within 10~15 working days for products without customization. You can also check lead time detail with our sales depending on different items.
5. Q: Do you provide customized products?
A: Yes, we can laser mark your logo on products; OEM and ODM customization is welcomed.
6. Q: What is your MOQ?
A: We have no MOQ limit, small quantity order is acceptable.
7. Q: What's the transport?
A: Express such as DHL, FedEx, TNT, and UPS for freight prepaid; and we can also use your own courier account to do the freight collect. For more goods, we can arrange by air or by Sea.
8. Q: What are your terms of payment?
A: We could accept T/T, Paypal, WU.
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